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Introduction to microfabrication /

Franssila, Sami

Introduction to microfabrication / Sami Franssila. - xvii, 401 p. : ill. ; 26 cm.

ISBN: 0470851066 (pbk.)

LCCN: 2004004940

Subjects--Topical Terms:
Microelectromechanical systems
Electronic apparatus and appliances
Microfabrication

LC Class. No.: TK7875 / .F73 2004

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