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Introduction to semiconductor manufacturing technology /

Xiao, Hong

Introduction to semiconductor manufacturing technology / Hong Xiao. - viii, 647 p. : ill. ; 24 cm.

ISBN: 0130224049

LCCN: 00055721

Subjects--Topical Terms:
Semiconductor industry
Semiconductors--Design and construction

LC Class. No.: TK7871.85 / X53 2001

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