Photonic MEMS devices :
Liu, Ai-Qun
Photonic MEMS devices : design, fabrication and control / Optical and photonic MEMS devices. Photonic micro-electro-mechanical systems devices. Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. - 465 p. : ill. - Optical science and engineering ; 136. .
9781420045680 1420045687
Fotonik--El kitapları vb.
Microelectromechanical systems
Mikroelektromekanik sistemler
Photonics
TK7875 / .L58 2009
Photonic MEMS devices : design, fabrication and control / Optical and photonic MEMS devices. Photonic micro-electro-mechanical systems devices. Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. - 465 p. : ill. - Optical science and engineering ; 136. .
9781420045680 1420045687
Fotonik--El kitapları vb.
Microelectromechanical systems
Mikroelektromekanik sistemler
Photonics
TK7875 / .L58 2009