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Modeling MEMS and NEMS /

Pelesko, John A.

Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein. - xxiii, 357 p. : ill. ; 24 cm.

ISBN: 1584883065 (alk. paper)

LCCN: 2002031599

Subjects--Topical Terms:
Microelectromechanical systems--Mathematical models
Mikroelektromekanik sistemler--Matematiksel modeller

LC Class. No.: TK7875 / .P45 2003

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