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Microengineering, MEMS, and interfacing :

Banks, Danny

Microengineering, MEMS, and interfacing : a practical guide / Danny Banks. - 326 p. : ill. ; 24 cm. - Mechanical Engineering ; 199 .

ISBN: 0824723058 (alk. paper)

LCCN: 2006042635

Subjects--Topical Terms:
Microelectromechanical systems
Mikroelektromekanik sistemler

LC Class. No.: TK7875 / .B36 2006

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