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Micro and nanomanufacturing /

Jackson, Mark J.

Micro and nanomanufacturing / Mark J. Jackson. - x, 699 p. : ill. ; 24 cm.

ISBN: 0387258744 (hd.bd.) 9780387258744 (hd.bd.)

LCCN: 2006932032

Nat. Bib. Agency Control No.: 977488861 GyFmDB

Subjects--Topical Terms:
Nanotechnology
Microfabrication

LC Class. No.: TK7836 / .J33 2007

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