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Semiconductor technology : processing and novel fabrication techniques /

Semiconductor technology : processing and novel fabrication techniques / edited by Mikhail E. Levinshtein, Michael S. Shur. - xviii, 240 p. : ill. ; 24 cm.

ISBN: 0471127922 (cloth :alk.paper)

Subjects--Topical Terms:
Semiconductor doping
Semiconductors--Defects
Semiconductors
Yarı iletkenler

LC Class. No.: TK7871.85 / .S46 1997

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