Fundamentals of microfabrication : the science of miniaturization /
Madou, Marc J.
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - 723 p. : col. ill. ; 29 cm.
Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA and Micromolding -- Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- Ch. 10. Miniaturization Applications -- App. A. Metrology Techniques for MEMS -- App. B. Living Book -- App. C. Si and SiO[subscript 2] Etch Rates in KOH -- App. D. Genetics -- App. F. MEMS Companies.
0849308267
Lasers--Industrial applications
Mikroelektromekanik sistemler--Tasarım ve yapım
Microelectromechanical systems--Design and construction
Lazerler--Endüstriyel uygulamalar
Integrated circuits--Design and construction
Entegre devreler--Tasarım ve yapım
Mikroelektronik ambalajlama
Microelectronic packaging
Microelectronics
Mikroelektronik
Machining
Makineleştirme
TK7836 / .M33 2002
Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou. - 2nd ed. - 723 p. : col. ill. ; 29 cm.
Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA and Micromolding -- Ch. 7. A Comparison of Miniaturization Techniques: Top-Down and Bottom-Up Manufacturing -- Ch. 8. Modeling, Brains, Packaging, Sample Preparation, and Substrate Choice -- Ch. 9. Scaling, Actuators, and Power in Miniaturized Systems -- Ch. 10. Miniaturization Applications -- App. A. Metrology Techniques for MEMS -- App. B. Living Book -- App. C. Si and SiO[subscript 2] Etch Rates in KOH -- App. D. Genetics -- App. F. MEMS Companies.
0849308267
Lasers--Industrial applications
Mikroelektromekanik sistemler--Tasarım ve yapım
Microelectromechanical systems--Design and construction
Lazerler--Endüstriyel uygulamalar
Integrated circuits--Design and construction
Entegre devreler--Tasarım ve yapım
Mikroelektronik ambalajlama
Microelectronic packaging
Microelectronics
Mikroelektronik
Machining
Makineleştirme
TK7836 / .M33 2002
