- Microelectromechanical systems
Microelectromechanical systems (Topical Term)
- MEMS (Microelectromechanical systems)
- MEMS (Mikroelektromekanik sistemler)
- Micro-electro-mechanical systems
- Mikro-elektro-mekanik sistemler
- Micro-machinery
- Microelectromechanical devices
- Mikroelektromekanik cihazlar
- Mikroelektromekanik aygıtlar
- Micromachinery
- Micromachines
- Micromechanical devices
- Mikromekanik aygıtlar
- Micromechanical systems
- Mikromekanik sistemler
- Mikroelektromekanik sistemler
- Broader heading: Electromechanical devices
- Broader heading: Microtechnology
- Mechatronics
Work cat.: 96069475: Microelectronic structures and MEMS for optical processing II, 1996: p. 4 (Microelectromechanical systems) p. 12 (whether they are called Micro-Electro-Mechanical Systems (MEMS), micromechanical systems, micromachines, or MicroSystems Technology, these manufacturing based technologies are enabling the development and production of many new exciting products)
Eng. ind. (subject: Microelectromechanical devices)
BPI (subjects: Microelectromechanical systems; Micromachines)
ASTI on FirstSearch, Sept. 26, 1997 (subjects: Micromachines; Mechatronics; titles: Microelectromechanical systems; micro machinery, etc.)
INSPEC on FirstSearch (descriptor: Micromechanical devices; titles: microelectromechanical systems, etc.)
LC database, Sept. 26, 1997 (in titles: Micro electro mechanical systems; Microelectromechanical systems; micromachines; microelectromechanical devices)
Univ. of Wash. Center for Applied Microtechnology (CAM) WWW home page, Dec. 12, 2001: What is CAM? (This new discipline of microtechnology embraces ... microelectronics and ... microelectromechanical systems)
The electronics handbook, 1996.
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