Franssila, Sami <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - xvii, 401 p. :  ill. ;  26 cm. 
<br/><br/>
<br/><br/><label>ISBN: </label>0470851066 (pbk.) 
<br/><br/><label>LCCN: </label>2004004940 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Electronic apparatus and appliances<br/>Microfabrication
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 2004