TY  - GEN
AU  - Franssila, Sami
TI  - Introduction to microfabrication
SN  - 0470851066 (pbk.)
AV  - TK7875 .F73 2004
PY  - 2004///
CY  - Chichester, West Sussex, England, Hoboken, NJ
PB  - J. Wiley
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/wiley041/2004004940.html
UR  - http://www.loc.gov/catdir/toc/wiley041/2004004940.html
ER  -