Quirk, Michael,  1953- <br/><br/>
Semiconductor manufacturing technology / 
Michael Quirk, Julian Serda. 
 - xiii, 666 p. :  ill. ;  29 cm. 
<br/><br/>
<br/><br/><label>ISBN: </label>0130815209 
<br/><br/><label>LCCN: </label>00041653 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Electronic industries
<br/><br/><label>LC Class. No.: </label>TK7836  / .Q27 2001