TY  - GEN
AU  - Quirk, Michael,
AU  - Serda, Julian
TI  - Semiconductor manufacturing technology
SN  - 0130815209
AV  - TK7836 .Q27 2001
PY  - 2001///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Semiconductors
KW  - Design and construction
KW  - Electronic industries
N1  - Includes bibliographical references (p. 647) and index
ER  -