Xiao, Hong <br/><br/>
Introduction to semiconductor manufacturing technology / 
Hong Xiao. 
 - viii, 647 p. :  ill. ;  24 cm. 
<br/><br/>
<br/><br/><label>ISBN: </label>0130224049 
<br/><br/><label>LCCN: </label>00055721 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor industry<br/>Semiconductors--Design and construction
<br/><br/><label>LC Class. No.: </label>TK7871.85  / X53 2001