TY  - GEN
AU  - Xiao, Hong
TI  - Introduction to semiconductor manufacturing technology
SN  - 0130224049
AV  - TK7871.85 X53 2001
PY  - 2001///
CY  - Upper Saddle River, N.J.
PB  - Prentice Hall
KW  - Semiconductor industry
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -