The MEMS handbook / 
edited by Mohamed Gad-el-Hak. 
 - 1 v. (various pagings) :  ill. ;  26 cm. 
 - The mechanical engineering handbook series. .
<br/><br/>
<br/><br/><label>ISBN: </label>0849300770 (alk. paper) 
<br/><br/><label>LCCN: </label>2001037402 
<br/><br/><label>Nat. Bib. No.: </label>GBA1-W1351 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engineering--Handbooks, manuals, etc.<br/>Microelectromechanical systems
<br/><br/><label>LC Class. No.: </label>TJ151  / .M46 2002