TY  - GEN
AU  - Gad-el-Hak,Mohamed
TI  - The MEMS handbook
T2  - The mechanical engineering handbook series
SN  - 0849300770 (alk. paper)
AV  - TJ151 .M46 2002
PY  - 2002///.[2001]
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Mechanical engineering
KW  - Handbooks, manuals, etc
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -