Liu, Ai-Qun <br/><br/>
Photonic MEMS devices :  design, fabrication and control / 
 Optical and photonic MEMS devices.  Photonic micro-electro-mechanical systems devices. 
Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. 
 - 465 p. :  ill. 
 - Optical science and engineering ;  136. .
<br/><br/>
<br/><br/><label>ISBN: </label>9781420045680 1420045687 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fotonik--El kitapları vb.<br/>Microelectromechanical systems<br/>Mikroelektromekanik sistemler<br/>Photonics
<br/><br/><label>LC Class. No.: </label>TK7875  / .L58 2009