TY  - GEN
AU  - Liu,Ai-Qun
TI  - Photonic MEMS devices: design, fabrication and control 
T2  - Optical science and engineering
SN  - 9781420045680
AV  - TK7875 .L58 2009
PY  - 2009///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Fotonik
KW  - El kitapları vb
KW  - Microelectromechanical systems
KW  - Mikroelektromekanik sistemler
KW  - Photonics
N1  - Includes bibliographical references
ER  -