TY - GEN AU - Bhushan, Bharat, TI - Springer handbook of nanotechnology SN - 9783642025242 (hardcover : alk. paper) AV - T174.7 .S67 2010 PY - 2010///] CY - Berlin, New York PB - Springer KW - Nanoteknoloji KW - El kitapları vb KW - Nanotechnology KW - Handbooks, manuals, etc N1 - Includes bibliographical references and index; A.Nanostructures, micro-/nanofabrication and materials -- B.Mems/Nems and BioMems/Nems -- C.Scanning-probe microscopy -- D.Bio-/Nanotribology and Bio-/Nanomechanics -- E.Molecularly thick films for lubrication -- F.Biomimetics -- G.Industrial applications -- H.Micro-/Nanodevice reliability -- I.Technological convergence and governing nanotechnology ER -