Banks, Danny <br/><br/>
Microengineering, MEMS, and interfacing :  a practical guide / 
Danny Banks. 
 - 326 p. :  ill. ;  24 cm. 
 - Mechanical Engineering ;  199 .
<br/><br/>
<br/><br/><label>ISBN: </label>0824723058 (alk. paper) 
<br/><br/><label>LCCN: </label>2006042635 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Mikroelektromekanik sistemler
<br/><br/><label>LC Class. No.: </label>TK7875  / .B36 2006