Jackson, Mark J. <br/><br/>
Micro and nanomanufacturing / 
Mark J. Jackson. 
 - x, 699 p. :  ill. ;  24 cm. 
<br/><br/>
<br/><br/><label>ISBN: </label>0387258744 (hd.bd.) 9780387258744 (hd.bd.) 
<br/><br/><label>LCCN: </label>2006932032 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>977488861  GyFmDB 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microfabrication
<br/><br/><label>LC Class. No.: </label>TK7836  / .J33 2007