TY  - GEN
AU  - Jackson, Mark J.
TI  - Micro and nanomanufacturing
SN  - 0387258744 (hd.bd.)
AV  - TK7836 .J33 2007
PY  - 2007///
CY  - New York
PB  - Springer
KW  - Nanotechnology
KW  - Microfabrication
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/fy0707/2006932032.html
ER  -