Semiconductor technology :  processing and novel fabrication techniques / 
edited by Mikhail E. Levinshtein, Michael S. Shur. 
 - xviii, 240 p. :  ill. ;  24 cm. 
<br/><br/>
<br/><br/><label>ISBN: </label>0471127922 (cloth :alk.paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor doping<br/>Semiconductors--Defects<br/>Semiconductors<br/>Yarı iletkenler
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .S46 1997