TY  - GEN
AU  - Levinshtein, M. E.,
AU  - Shur, Michael
TI  - Semiconductor technology: processing and novel fabrication techniques 
SN  - 0471127922 (cloth :alk.paper)
AV  - TK7871.85 .S46 1997
PY  - 1997///
CY  - New York
PB  - John Wiley
KW  - Semiconductor doping
KW  - Semiconductors
KW  - Defects
KW  - Yarı iletkenler
N1  - Includes bibliographical references and index
ER  -