Fundamentals of semiconductor fabrication /
Gary S. May, Simon M. Sze.
- xiii, 305 p. : ill. ; 26 cm.
Ch.1. Introduction-- Crystal Growth-- Photolithography-- Etching-- Diffusion-- Film Deposition-- Process Integration-- IC Manufacturing-- Future Trends and Challenges App. B International System of Units (SI Units) App. C Unit Prefixes App. D Greek Alphabet App. E Physical Constants App. F Properties of Si and GaAs at 300 K App. G Some Properties of the Error Function App. H Basic Kinetic Theory of Gases App. I SUPREM Commands App. J Running PROLITH App. K Percentage Points of the t Distribution App. L Percentage Points of the F Distribution Ch.2. Ch.3.Silicon Oxidation-- Ch.4. Ch.5. Ch.6 Ch.7.t Ch.8. Ch.9. Ch.10. Ch.11.
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Yarı iletkenler--Tasarım ve yapım Semiconductors--Design and construction