TY  - GEN
AU  - Plummer, James D.
AU  - Deal, Michael D.
AU  - Griffin, Peter B.
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
T2  - Prentice Hall electronics and VLSI series
SN  - 0130850373
AV  - TK7874.75 .P54 2000
PY  - 2000///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Silicon
KW  - Silikon
KW  - etuturkob
KW  - Silicon oxide films
KW  - Silicon-on-insulator technology
KW  - Entegre devreler
KW  - Çok büyük ölçekli entegrasyon
KW  - Tasarım ve yapım
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Metal oxide semiconductors
KW  - Metal oksit yarı iletkenleri
N1  - Includes bibliographical references and index
ER  -