TY  - BOOK
AU  - Jiang,Zhengyi
AU  - Zhao,Jingwei
AU  - Xie,Haibo
ED  - Ohio Library and Information Network
TI  - Microforming technology: theory, simulation and practice 
SN  - 9780128112137
AV  - TS176 
PY  - 2017///]
CY  - London, United Kingdom
PB  - Academic Press
KW  - Production engineering
KW  - Microtechnology
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - https://www.safaribooksonline.com/library/view/-/9780128112137/?ar
ER  -