| 000 | 01047 a2200313 4500 | ||
|---|---|---|---|
| 001 | 10871 | ||
| 999 |
_c10871 _d817 |
||
| 003 | TR-AnTOB | ||
| 005 | 20200510105355.0 | ||
| 008 | 040301s2004 enka b 001 0 eng | ||
| 010 | _a2004004940 | ||
| 020 | _a0470851066 (pbk.) | ||
| 040 |
_aDLC _cDLC _dDLC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 |
_aTK7875 _b.F73 2004 |
|
| 090 | _aTK7875 .F73 2004 | ||
| 100 |
_aFranssila, Sami _92418 |
||
| 245 | 0 |
_aIntroduction to microfabrication / _cSami Franssila. |
|
| 264 | 1 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJ. Wiley, _cc2004. |
|
| 300 |
_axvii, 401 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_aMicroelectromechanical systems _9718 |
||
| 650 |
_aElectronic apparatus and appliances _92419 |
||
| 650 |
_aMicrofabrication _92420 |
||
| 856 | 4 |
_uhttp://www.loc.gov/catdir/description/wiley041/2004004940.html _3Publisher description |
|
| 856 | 4 |
_uhttp://www.loc.gov/catdir/toc/wiley041/2004004940.html _3Table of contents |
|
| 942 | _cBK | ||