000 01049 a2200325 4500
001 13085
999 _c13085
_d2274
003 TR-AnTOB
005 20240912131357.0
008 010601s20012002flua bf 001 0 eng
010 _a2001037402
015 _aGBA1-W1351
020 _a0849300770 (alk. paper)
035 _a(OCoLC)ocm47091984
040 _aDLC
_cDLC
_dUKM
_dC
041 _aeng
042 _apcc
050 0 _aTJ151
_b.M46 2002
090 _aTJ151 .M46 2002
245 4 _aThe MEMS handbook /
_cedited by Mohamed Gad-el-Hak.
264 1 _aBoca Raton, Fla. :
_bCRC Press,
_cc2002.[2001].
300 _a1 v. (various pagings) :
_bill. ;
_c26 cm.
490 0 _aThe mechanical engineering handbook series.
504 _aIncludes bibliographical references and index.
650 0 _aMechanical engineering
_vHandbooks, manuals, etc.
_95800
650 _aMicroelectromechanical systems
_9718
700 1 _aGad-el-Hak, Mohamed,
_d1945-
_921612
852 _yAvailable
_712804959
942 _cBK