| 000 | 01009 a2200313 4500 | ||
|---|---|---|---|
| 001 | 200002779 | ||
| 999 |
_c200002779 _d29717 |
||
| 003 | TR-AnTOB | ||
| 005 | 20200511131801.0 | ||
| 008 | 101224s2009 tu 000 0 | ||
| 020 | _a9781420045680 | ||
| 020 | _a1420045687 | ||
| 041 | _aeng | ||
| 050 |
_aTK7875 _b.L58 2009 |
||
| 090 | _aTK7875.L58 2009 | ||
| 100 | 1 |
_aLiu, Ai-Qun _972487 |
|
| 245 | 1 | 0 |
_aPhotonic MEMS devices : _bdesign, fabrication and control / _cAi-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. |
| 246 | 1 | _aOptical and photonic MEMS devices. | |
| 246 | 3 | _aPhotonic micro-electro-mechanical systems devices. | |
| 264 | 1 |
_aBoca Raton, FL : _bCRC Press, _c2009. |
|
| 300 |
_a465 p. : _bill. |
||
| 490 | 0 |
_aOptical science and engineering ; _v136. |
|
| 504 | _aIncludes bibliographical references. | ||
| 650 | 0 |
_aFotonik _vEl kitapları vb. _949573 |
|
| 650 | 0 |
_aMicroelectromechanical systems _9718 |
|
| 650 | 0 |
_aMikroelektromekanik sistemler _931268 |
|
| 650 | 0 |
_aPhotonics _91270 |
|
| 942 | _cBK | ||