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007			cr nn 008mamaa
008			211012s2022 sz | s |||| 0|eng d
020			_a9783030797492
024	7		_a10.1007/978-3-030-79749-2 _2doi
040			_aTR-AnTOB _beng _erda _cTR-AnTOB
041			_aeng
050		4	_aTK7875
072		7	_aTJF _2bicssc
072		7	_aTEC027000 _2bisacsh
072		7	_aTJF _2thema
090			_aTK7875EBK
245	1	0	_aAdvanced MEMS/NEMS Fabrication and Sensors _h[electronic resource] / _cedited by Zhuoqing Yang.
250			_a1st ed. 2022.
264		1	_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2022.
300			_a1 online resource
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aTip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.
520			_aThis book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
650		0	_aMicrotechnology.
650		0	_aMicroelectromechanical systems.
650		0	_aElectronics.
650		0	_aCooperating objects (Computer systems).
650		0	_aMaterials.
650	1	4	_aMicrosystems and MEMS.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCyber-Physical Systems.
650	2	4	_aMaterials Engineering.
653		0	_aMicrofabrication
653		0	_aNanoelectromechanical systems
700	1		_aYang, Zhuoqing. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt
710	2		_aSpringerLink (Online service)
856	4	0	_uhttps://doi.org/10.1007/978-3-030-79749-2 _3Springer eBooks _zOnline access link to the resource
942			_2lcc _cEBK