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020 _a9783030801359
024 7 _a10.1007/978-3-030-80135-9
_2doi
040 _aTR-AnTOB
_beng
_cTR-AnTOB
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041 _aeng
050 4 _aTK7871.86
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072 7 _aTEC008000
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245 1 0 _aSilicon Sensors and Actuators
_h[electronic resource] :
_bThe Feynman Roadmap /
_cedited by Benedetto Vigna, Paolo Ferrari, Flavio Francesco Villa, Ernesto Lasalandra, Sarah Zerbini.
250 _a1st ed. 2022.
264 1 _aCham :
_bSpringer International Publishing :
_bImprint: Springer,
_c2022.
300 _a1 online resource
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _a1. Silicon as Sensor Material -- 2. Epitaxial Growth -- 3. Thin Film Deposition -- 4. Thin Films Characterization & Metrology -- 5. Dry silicon etch -- 6. Lithography -- 7. HF Release -- 8. Galvanic growth -- 9. Wet Etch and Cleaning -- 10. Piezoelectric materials -- 11. Wafer to wafer Bonding.-12. Linear and non linear mechanichs in MEMS -- 13. Inertial sensors -- 14. Magnetometer -- 15. MEMS microphones -- 16. Pressure Sensors -- 17. Enviromental Sensors -- 18. Mirror -- 19. Piezo ink jet printers -- 20. Speakers -- 21. Autofocus -- 22. Electronic sensors front-end -- 23. Electronic Interfaces for actuators -- 24. Package -- 25. Testing -- 26. Reliability -- 27. The future of sensor and actuators.
520 _aThis book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
650 0 _aElectronics.
650 0 _aMicrotechnology.
650 0 _aMicroelectromechanical systems.
650 0 _aElectronic circuits.
650 0 _aMaterials.
650 1 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aMicrosystems and MEMS.
650 2 4 _aElectronic Circuits and Systems.
650 2 4 _aMaterials Engineering.
650 2 4 _aElectronic Circuits and Systems.
653 0 _aSilicon diodes
653 0 _aActuators
700 1 _aVigna, Benedetto.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
700 1 _aFerrari, Paolo.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
700 1 _aVilla, Flavio Francesco.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
700 1 _aLasalandra, Ernesto.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
700 1 _aZerbini, Sarah.
_eeditor.
_4edt
_4http://id.loc.gov/vocabulary/relators/edt
710 2 _aSpringerLink (Online service)
856 4 0 _uhttps://doi.org/10.1007/978-3-030-80135-9
_3Springer eBooks
_zOnline access link to the resource
942 _2lcc
_cEBK