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020 _a9789811694431
024 7 _a10.1007/978-981-16-9443-1
_2doi
040 _aTR-AnTOB
_beng
_erda
_cTR-AnTOB
041 _aeng
050 4 _aTK7875
072 7 _aTJF
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTJF
_2thema
090 _aTK7875EBK
100 1 _aKoul, Shiban Kishen.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
245 1 0 _aMicromachined Circuits and Devices
_h[electronic resource] :
_bMicrowave to Sub-millimeter Applications /
_cby Shiban Kishen Koul, Sukomal Dey.
250 _a1st ed. 2022.
264 1 _aSingapore :
_bSpringer Nature Singapore :
_bImprint: Springer,
_c2022.
300 _a1 online resource
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aLecture Notes in Electrical Engineering,
_x1876-1119 ;
_v859
505 0 _aIntroduction to Radio Frequency Micro Electromechanical Systems -- Micromachined Microwave Passive Circuits -- Micromachined Single-Pole-Single-Throw Switches -- Micromachined Single-Pole-Multi-Thru Switching Networks -- Micromachined Resonators and Circuits -- Micromachined Phase Shifters -- Micromachined Tunable Filters using MEMS Switches -- Reliability Analysis of RF MEMS Devices -- Micromachined Antennas -- Micromachined Metamaterial Inspired Switches -- Future Scope of RF MEMS at THz Regime.
520 _aThis book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.
650 0 _aMicrotechnology.
650 0 _aMicroelectromechanical systems.
650 0 _aNanoscience.
650 0 _aMetamaterials.
650 0 _aTelecommunication.
650 0 _aSignal processing.
650 1 4 _aMicrosystems and MEMS.
650 2 4 _aNanophysics.
650 2 4 _aMetamaterials.
650 2 4 _aMicrowaves, RF Engineering and Optical Communications.
650 2 4 _aSignal, Speech and Image Processing .
653 0 _aMicroelectromechanical systems
653 0 _aMicromachining
653 0 _aNanoscience
653 0 _aMetamaterials
700 1 _aDey, Sukomal.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
710 2 _aSpringerLink (Online service)
830 0 _aLecture Notes in Electrical Engineering,
_x1876-1119 ;
_v859
856 4 0 _uhttps://doi.org/10.1007/978-981-16-9443-1
_3Springer eBooks
_zOnline access link to the resource
942 _2lcc
_cEBK