000 01064 a2200325 4500
001 57348
999 _c57348
_d14544
003 TR-AnTOB
005 20190408214020.0
008 070113s2003 flua b 001 0 eng
010 _a2002031599
020 _a1584883065 (alk. paper)
040 _aDLC
_cDLC
_dDLC
041 _aeng
042 _apcc
050 _aTK7875
_b.P45 2003
090 _aTK7875 .P45 2003
100 _aPelesko, John A.
_929923
245 0 _aModeling MEMS and NEMS /
_cJohn A. Pelesko and David H. Bernstein.
264 1 _aBoca Raton, FL :
_bChapman & Hall/CRC,
_c2003.
300 _axxiii, 357 p. :
_bill. ; 24 cm.
504 _aIncludes bibliographical references and i(p. 325-340) and index.
650 _aMicroelectromechanical systems
_xMathematical models
_929925
650 _aMikroelektromekanik sistemler
_xMatematiksel modeller
_929926
700 _aBernstein, David H.
_929924
856 4 _uhttp://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html
_3Publisher description
901 _a0017676
902 _abs
942 _cBK