000 | 01064 a2200325 4500 | ||
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001 | 57348 | ||
999 |
_c57348 _d14544 |
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003 | TR-AnTOB | ||
005 | 20190408214020.0 | ||
008 | 070113s2003 flua b 001 0 eng | ||
010 | _a2002031599 | ||
020 | _a1584883065 (alk. paper) | ||
040 |
_aDLC _cDLC _dDLC |
||
041 | _aeng | ||
042 | _apcc | ||
050 |
_aTK7875 _b.P45 2003 |
||
090 | _aTK7875 .P45 2003 | ||
100 |
_aPelesko, John A. _929923 |
||
245 | 0 |
_aModeling MEMS and NEMS / _cJohn A. Pelesko and David H. Bernstein. |
|
264 | 1 |
_aBoca Raton, FL : _bChapman & Hall/CRC, _c2003. |
|
300 |
_axxiii, 357 p. : _bill. ; 24 cm. |
||
504 | _aIncludes bibliographical references and i(p. 325-340) and index. | ||
650 |
_aMicroelectromechanical systems _xMathematical models _929925 |
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650 |
_aMikroelektromekanik sistemler _xMatematiksel modeller _929926 |
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700 |
_aBernstein, David H. _929924 |
||
856 | 4 |
_uhttp://www.loc.gov/catdir/enhancements/fy0646/2002031599-d.html _3Publisher description |
|
901 | _a0017676 | ||
902 | _abs | ||
942 | _cBK |