| 000 | 01212 a2200385 4500 | ||
|---|---|---|---|
| 999 |
_c63898 _d16865 |
||
| 001 | 63898 | ||
| 003 | TR-AnTOB | ||
| 005 | 20200427123447.0 | ||
| 008 | 071002s2006 flua b 001 0 eng | ||
| 010 | _a2006042635 | ||
| 020 | _a0824723058 (alk. paper) | ||
| 035 | _a(OCoLC)ocm64511340 | ||
| 040 |
_aDLC _cDLC _dYDX _dBAKER _dOCLCQ _dDLC |
||
| 041 | _aeng | ||
| 042 | _apcc | ||
| 050 | 0 |
_aTK7875 _b.B36 2006 |
|
| 090 | _aTK7875 .B36 2006 | ||
| 100 |
_aBanks, Danny _936858 |
||
| 245 | 0 |
_aMicroengineering, MEMS, and interfacing : _ba practical guide / _cDanny Banks. |
|
| 264 | 1 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006. |
|
| 300 |
_a326 p. : _bill. ; _c24 cm. |
||
| 336 |
_2rdacontent _atext _btxt |
||
| 337 |
_2rdamedia _aunmediated _bn |
||
| 338 |
_2rdacarrier _avolume _bnc |
||
| 490 | 0 |
_aMechanical Engineering ; _v199 |
|
| 504 | _aIncludes bibliographical references and index. | ||
| 650 |
_aMicroelectromechanical systems _9718 |
||
| 650 |
_aMikroelektromekanik sistemler _931268 |
||
| 856 | 4 |
_uhttp://www.loc.gov/catdir/enhancements/fy0648/2006042635-d.html _3Publisher description |
|
| 901 | _a0020964 | ||
| 902 | _abs | ||
| 942 |
_cBK _2lcc |
||