000 01403 a2200397 4500
001 65480
999 _c65480
_d2374
003 TR-AnTOB
005 20200510105355.0
008 110503s2007 nyua b 001 0 d
010 _a2006932032
016 _a977488861
_2GyFmDB
020 _a0387258744 (hd.bd.)
020 _a9780387258744 (hd.bd.)
035 _a(OCoLC)ocm78202883
040 _aOHX
_cOHX
_dUAT
_dYDXCP
_dIXA
_dDLC
041 _aeng
042 _alccopycat
050 0 _aTK7836
_b.J33 2007
072 _aTJ
_2lcco
090 _aTK7836 .J33 2007
100 _aJackson, Mark J.
_937829
245 0 _aMicro and nanomanufacturing /
_cMark J. Jackson.
264 1 _aNew York :
_bSpringer,
_cc2007.
300 _ax, 699 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 _aNanotechnology
_95929
650 _aMicrofabrication
_92420
856 _uhttp://www.loc.gov/catdir/toc/fy0707/2006932032.html
_3Table of contents only
906 _a7
_bcbc
_ccopycat
_d2
_encip
_f20
_gy-gencatlg
925 _aacquire
_b2 shelf copies
_xpolicy default
955 _ejx85 2007-03-12 to Dewey
963 _aChris Simpson; phone: (781) 681-0571; email: chris.simpson
_springer.com; bc: rhea.siegel
_springer.com
942 _cBK