000 00967 a2200301 4500
001 73218
999 _c73218
_d21459
003 TR-AnTOB
005 20200613131920.0
008 081230s1997 nyu 00000 eng
020 _a0471127922 (cloth :alk.paper)
041 _aeng
050 _aTK7871.85
_b.S46 1997
090 _aTK7871.85 .S46 1997
245 0 _aSemiconductor technology :
_bprocessing and novel fabrication techniques /
_cedited by Mikhail E. Levinshtein, Michael S. Shur.
264 1 _aNew York :
_bJohn Wiley,
_cc1997.
300 _axviii, 240 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aSemiconductor doping
_950826
650 0 _aSemiconductors
_xDefects
_950827
650 _aSemiconductors
_9151
650 _aYarı iletkenler
_92857
700 _aLevinshtein, M. E.,
_q(Mikhail Efimovich)
_950824
700 _aShur, Michael
_950825
902 _a0027455
903 _aMerkez Kutuphane
945 _aSC, CS
942 _cBK