000 | 00967 a2200301 4500 | ||
---|---|---|---|
001 | 73218 | ||
999 |
_c73218 _d21459 |
||
003 | TR-AnTOB | ||
005 | 20200613131920.0 | ||
008 | 081230s1997 nyu 00000 eng | ||
020 | _a0471127922 (cloth :alk.paper) | ||
041 | _aeng | ||
050 |
_aTK7871.85 _b.S46 1997 |
||
090 | _aTK7871.85 .S46 1997 | ||
245 | 0 |
_aSemiconductor technology : _bprocessing and novel fabrication techniques / _cedited by Mikhail E. Levinshtein, Michael S. Shur. |
|
264 | 1 |
_aNew York : _bJohn Wiley, _cc1997. |
|
300 |
_axviii, 240 p. : _bill. ; _c24 cm. |
||
504 | _aIncludes bibliographical references and index. | ||
650 | 0 |
_aSemiconductor doping _950826 |
|
650 | 0 |
_aSemiconductors _xDefects _950827 |
|
650 |
_aSemiconductors _9151 |
||
650 |
_aYarı iletkenler _92857 |
||
700 |
_aLevinshtein, M. E., _q(Mikhail Efimovich) _950824 |
||
700 |
_aShur, Michael _950825 |
||
902 | _a0027455 | ||
903 | _aMerkez Kutuphane | ||
945 | _aSC, CS | ||
942 | _cBK |