Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze.

By:

May, Gary S

Contributor(s):

Sze, Simon M, 1936-

Language: İngilizce Publisher: New York: Wiley, c2004Description: xiii, 305 p. : ill. ; 26 cmISBN:

0471232793

Subject(s):

LOC classification:

TK7871.85 .M39 2004

Contents:

Ch.2. Ch.3.Silicon Oxidation-- Ch.4. Ch.5. Ch.6 Ch.7.t Ch.8. Ch.9. Ch.10. Ch.11. Introduction-- Crystal Growth-- Photolithography-- Etching-- Diffusion-- Film Deposition-- Process Integration-- IC Manufacturing-- Future Trends and Challenges App. B International System of Units (SI Units) App. C Unit Prefixes App. D Greek Alphabet App. E Physical Constants App. F Properties of Si and GaAs at 300 K App. G Some Properties of the Error Function App. H Basic Kinetic Theory of Gases App. I SUPREM Commands App. J Running PROLITH App. K Percentage Points of the t Distribution App. L Percentage Points of the F Distribution

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Holdings
Item type	Current library	Home library	Collection	Call number	Vol info	Copy number	Status	Date due	Barcode
Book	Merkez Kütüphane Genel Koleksiyon / Main Collection	Merkez Kütüphane	Genel Koleksiyon	TK7871.85 .M39 2004 (Browse shelf(Opens below))	1	1	Available		0027705

Ch.1. Ch.2. Ch.3.Silicon Oxidation-- Ch.4. Ch.5. Ch.6 Ch.7.t Ch.8. Ch.9. Ch.10. Ch.11. Introduction-- Crystal Growth-- Photolithography-- Etching-- Diffusion-- Film Deposition-- Process Integration-- IC Manufacturing-- Future Trends and Challenges App. B International System of Units (SI Units) App. C Unit Prefixes App. D Greek Alphabet App. E Physical Constants App. F Properties of Si and GaAs at 300 K App. G Some Properties of the Error Function App. H Basic Kinetic Theory of Gases App. I SUPREM Commands App. J Running PROLITH App. K Percentage Points of the t Distribution App. L Percentage Points of the F Distribution

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